Surface Nanostructuring of TiO2 Thin Films by Ion Beam Irradiation
نویسندگان
چکیده
This work reports a procedure to modify the surface nanostructure of TiO2 anatase thin films through ion beam irradiation with energies in the keV range. The irradiation with N ions leads to the formation of a layer with voids at a depth similar to the ion projected range. By setting the ion projected range few tens of nanometres below the surface of the film, well ordered nanorods appear aligned with the angle of incidence of the ion beam. Slightly different results were obtained by using heavier (S) and lighter (B) ions under similar conditions. Email: [email protected] * Text only Click here to view linked References
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